摘要
由于尺寸小,使用常规热电偶静态标定方法标定薄膜热电偶时,在标定过程与使用过程中,传感器和补偿导线上的温度梯度分布不一致,使薄膜热电偶的热电势也不同,影响其测温准确性。为解决这一问题,设计了集薄膜金—铂热电偶和薄膜铂电阻器于一体的自标定薄膜温度传感器及其标定系统,使用电子印刷法制备传感器,采用激光加热技术模拟其使用时的温度分布,通过有限元仿真分析其温度分布规律,基于温度外推实现薄膜热电偶静态特性自标定。结果显示,传感器中的薄膜热电偶在室温到300℃内的塞贝克系数为5. 3～7. 6μV/℃。
Due to small size,when using conventional static calibration method of thermocouple to calibrate thinfilm thermocouple( TFTC),the temperature gradient distributions in sensor and compensating wires are different in calibration and application processes,so the thermal electromotive forces of TFTC are also different,this has an impact on the accuracy of temperature measurement. To solve this problem,a self-calibration thin-film temperature sensor,which combines Au-Pt TFTC and the thin-film platinum resistor,and its calibration system are designed.The sensor is manufactured by the electronic printing method. The laser heating technique is used to simulate the temperature distribution of TFTC in application. The temperature distribution rule of sensor is analyzed based on the finite element simulation. The static self-calibration of TFTC is realized based on the temperature extrapolation. The result shows that the Seebeck coefficients of the TFTC in sensor are from 5. 3 to 7. 6 μV/℃ in the range from room temperature to 300 ℃.
作者
陈柔茹
丁炯
杨遂军
叶树亮
CHEN Rou-ru;DING Jiong;YANG Sui-jun;YE Shu-liang(Research Institute of Industry and Trade Measurement Technology,China Jiliang University,Hangzhou 310018,China)
出处
《传感器与微系统》
CSCD
2019年第4期114-116,124,共4页
Transducer and Microsystem Technologies
基金
浙江省自然科学基金资助项目(LQ15F030003
LY17F010011)
浙江省仪器科学与技术重中之重学科人才培育计划项目(JL150501)
关键词
薄膜热电偶
自标定
温度外推
有限元仿真
thin-film thermocouple
self-calibration
temperature extrapolation
finite element simulation
