摘要
论述了集成电路(IC)中静电的产生机理及其放电形式,分析了静电对集成电路器件的危害,在此基础上阐述了集成电路生产中预防静电的相关措施。
This paper discusses the generation mechanism and discharge form of static electricity in Integrated Circuits（IC）,and analyzes the harm of static electricity to IC devices. On this basis,the related measures to prevent static electricity in IC production are expounded.
作者
郭昌宏
周金成
李习周
张易勒
GUO Changhong;ZHOU Jincheng;LI Xizhou;Zhang Yile(TianshuiHuaTian Technology Co.Ltd., Tianshui 741000, China)
出处
《电子工业专用设备》
2018年第3期47-51,共5页
Equipment for Electronic Products Manufacturing
关键词
静电
防护
损坏
Electrostatic
Protection
Damage
