摘要
通过扫描电镜SEM与EDS等分析工具研究氧化铝陶瓷表面三次金属化的烧结工艺。结果表明,陶瓷表面三次金属化的烧结温度与烧结气氛对钎料层的结合状况与表面形貌产生重要的影响。820℃与干氢的烧结工艺适合钎料层与镍层的结合。过高的烧结温度与湿氢烧结条件易在钎料层与镍层之间产生缝隙,甚至凸起或凹坑,严重影响三次金属化的烧结质量。
The sintering process of the third metallization of alumina ceramic was studied by scanning electron microscopy and energy dispersive spectrometer. The results show that the sintering temperature and atmosphere of metallization on the ceramic surface has an important effect on the bonding condition and the surface morphology of the brazing layer. The sintering process of 820℃ and dry hydrogen is suitable for bonding of the solder layer and the nickel layer. Excessive sintering temperature and wet hydrogen sintering conditions are easy to create a gap between the solder layer and the nickel layer, or even bumps or pits, which seriously affect the sintering quality of the third metallization of alumina ceramic.
出处
《真空》
CAS
2018年第1期65-67,共3页
Vacuum
关键词
氧化铝陶瓷
三次金属化
烧结
湿氢
电真空
alumina ceramics
third metallization
sintering
wet hydrogen
electronic vacuum
