6LAI Shihwei, KIANG Jeanfu. A CMOS - MEMS single - chip dual - axis gyroscope [ C ]. IEEE International Microsystems Packing Assembly and Circuits Technology Conference, 2009:305 - 307. 被引量：1
7SAID E A,KIVANC A,TAYFUN A. A high -performance sili- con- on- insulator MEMS gyroscope operating at atmospheric pressure [ J ]. Sensors and Actuators,2007,135 (2) :34 - 42. 被引量：1
8ALPER S E, AKIN T. A Single - crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate [J]. Journal of Microelectmmechanical Systems, 2005, 14 (4) :707 -717. 被引量：1
9SUN Hongzhi, JIA Kemiao, DING Yingtao, et al. A monolithic inertial measurement unit fabricated with improved DRIE post- CMOS process [C]. Proceedings of IEEE Sensors, 2010 : 1198 - 1202. 被引量：1
10SUN Hongzhi, JIA Kemiao, LIU Xuesong, et al. A low tem- perature - dependence gain - boosting front - end amplifier for CMOS - MEMS gyroscopes [ C]. Proceedings of IEEE Sensors ,2010 : 1029 - 1032. 被引量：1
