摘要
相对于传统机械而言,微机电系统(MEMS)器件的摩擦磨损问题显得更加突出,对MEMS的摩擦磨损进行研究,并提供有效的润滑手段是保证其设备功能和使用寿命的关键。针对开展MEMS微观摩擦磨损研究的需要,概述了常用的微观摩擦磨损测试仪器,包括扫描隧道显微镜(STM)、原子力显微镜(AFM)、摩擦力显微镜(FFM)等探针类实验装置以及球-盘式、销-盘式、针-盘式和微轴承式摩擦副的微摩擦磨损实验装置,着重介绍了它们的工作原理和适用对象。并根据MEMS技术的发展现状,对微观摩擦磨损实验仪器的发展趋势进行了展望。
The friction and wear issue of the micro-electromechanical system（MEMS）devices appears to be more prominent compared with the traditional machinery,and the research of the friction and wear for the MEMS devices and providing effective lubrication are the key factors to ensure the function and service life of the MEMS devices.In order to study the MEMS micro friction and wear,an overview of the commonly used microfriction and wear testing devices are introduced,including the probe micro-friction testing instruments（i.e.the scanning tunneling microscope（STM）,atomic force microscope（AFM）and frictional force microscope（FFM））and the micro friction and wear experimental instruments（i.e.the ball-on-disc,pin-on-disc,needle-ondisc and micro-bearing friction pair）.And the operational principle and application objects of the instruments are emphatically introduced.Besides,the development tendency of the micro friction and wear testing instruments is prospected according to the current state of the MEMS technology.
出处
《微纳电子技术》
北大核心
2016年第8期520-526,共7页
Micronanoelectronic Technology
基金
江苏省自然科学基金资助项目(BK20131114)
江苏省大学生实践创新训练计划资助项目(201510290020Y)
中国矿业大学大学生创新创业基金立项大学生创新项目(201511)
关键词
微电子机械系统(MEMS)
微摩擦磨损
摩擦副
测试仪器
分辨力
micro-electromechanical system（MEMS）
micro friction and wear
friction pair
testing instrument
resolution
