摘要
针对介观尺度下的微小摩擦测试系统进行了设计，给出了一种基于平行梁结构的微小摩擦力测试方法及其测试装置，介绍了该测试装置的设计方法、测力传感器的结构设计、微小摩擦力测试原理及测力传感器标定方法。通过光反射法对测力传感器进行标定及微小摩擦力测量，通过对测量数据分析，得到微小摩擦力实验规律。实验结果表明：该装置分辨率可达到为10μN，可满足短行程高分辨率的微小摩擦力测试的需要，同时对测量过程中出现的载荷不稳定情况进行了分析。
The law of micro-friction in meso-scale is studied. One optical testing method of micro friction based on the structure of parallel cantilever is given and the testing system is designed, the composition of test system, testing method, the design of force sensor , the testing method and the calibration of force sensor are introduced. The force sensor is calibrated and the deformation of sensor is measured by light reflection. Then the micro friction is obtained by analyzing data. The results of the experiment show the resolution of specification of micro friction testing is 10μN, which could meet the demands of micro friction testing with short stroke and high resolution and realize the precise test of micro friction. And at the same time it has been analysed which load is unstable during testing.
出处
《计量学报》
CSCD
北大核心
2013年第5期452-456,共5页
Acta Metrologica Sinica
关键词
计量学
微小摩擦
光反射法
测力传感器
平行梁
Metrology
Micro-friction
Reflection method
Force sensor
Parallel cantilever
