摘要
为了有效解决双臂集束型设备调度过程中的驻留约束和重入问题,采用虚拟化方法将双臂机械手转化为一个单臂机械手和一个虚拟缓冲模块,定义了晶圆投放策略,建立了调度问题的非线性规划模型.在此基础上,结合所建数学模型提出了一种基于搜索的启发式算法,并对其进行仿真分析.结果表明,所提出的算法是可行且有效的.
To deal with the residency and reentrant constraints problem of dual-arm cluster tools in the scheduling process,a dual-arm robot was regarded as the combination of a single-arm robot and a virtual buffer module with a virtual method.A policy of the wafer releases was defined,and a nonlinear mathematical model of the scheduling problem was established.A heuristic algorithm based on searching was proposed.Simulation experiments were conducted to evaluate the proposed algorithm.The results indicate that the proposed algorithm is effective and feasibile.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
2016年第6期923-928,936,共7页
Journal of Shanghai Jiaotong University
基金
国家自然科学基金项目(61273035
71471135)资助
关键词
驻留约束
重入
双臂机械手
设备调度
residency constraints
reentrancy
dual-arm robot
equipment scheduling
