摘要
交叉环单向循环搬运系统是柔性制造系统或物流系统的典型基本环节,在半导体晶圆制造自动化搬运系统中有着广泛的运用,其搬运效率的叠加往往决定着整个系统的效率。不同的调度规则影响着小车间的堵塞状况,进而影响了整个柔性制造系统的搬运效率。为了减少堵塞并提高系统效率,构建了交叉环单向循环搬运系统的数学模型并对系统进行仿真分析,比较了不同调度规则的优劣性,得出较优的调度规则。仿真显示:在工件处理时间相同时,顺序调度规则优于随机调度规则,在工件处理时间不同时,最短处理时间与顺序调度规则相结合能减少更多的堵塞且提高效率,实现系统优化。
Unidirectional circulation-type material handling system on a single loop with a shortcut is a typical and basic unit in a flexible manufacturing system or logistics system. It is widely used in semiconductor wafer fabrication system. Superposition efficiency of the basic unit often determines the one of the whole system. Different scheduling rules impact the interference between AGVs and then have an important effect on the efficiency of the whole system. To decrease the interference and improve performance of the system, a mathematical model of this system was made, analyzing this system by simulation and comparing the merits and demerits under the different scheduling rules. Simulation results show that the Order rule is better than the Random rule under the condition of same processing time. Under the condition of different processing time, the SPT-Order rule not only makes congestion (interference time) decrease but also achieves the optimalperformance.
出处
《系统仿真学报》
CAS
CSCD
北大核心
2016年第7期1561-1566,1574,共7页
Journal of System Simulation
基金
上海市教委重点创新项目(12ZZ167)
教育部留学归国基金(D-8002-13-0343-2)
关键词
物料搬运系统
调度
交叉环
优化
material handling system
scheduling
short-cut
optimization