摘要
采用酸催化溶胶-凝胶法于n型单晶硅基片表面制备出硅酸锆薄膜。运用XRD、SEM等分析测试手段对比了酸催化、回流和陈化三种不同凝胶化工艺对薄膜的相组成和显微形貌的影响。通过粘度-时间曲线观察了溶胶的稳定性并通过FT-IR研究了溶胶水解缩聚的过程。实验结果表明:相比酸催化和回流工艺,采用HNO_3调节pH值至1时,可以有效缓解正硅酸乙酯的快速水解缩聚,制备出均匀稳定的硅酸锆溶胶,经提拉镀膜、900℃煅烧0.5 h得到致密光滑的硅酸锆薄膜,能够有效防止NaOH强碱溶液对单晶硅片基底的腐蚀。
Zirconium silicate（ZrSiO_4）film was prepared on n-type silicon substrate via sol-gel method with nitric acid catalysis.The effect of gelation process,such as nitric acid catalysis,reflux and ageing on the phase composition and the microstructure of the thin film was studied by means of X-ray diffraction patterns（XRD）and scanning electron microscopy（SEM）,respectively.Meanwhile,the stability of sol was identified by time-viscosity curves and the hydrolytic polycondensation process was investigated by Fourier transform infrared（FTIR）spectrum.The experimental results indicated that compared to reflux and ageing processes,the introduction of nitric acid to adjust the p H value to 1 was favorable to achieve the stable ZrSiO_4 sol,because the hydrolytic polycondensation of tetraethoxysilane slowed down.A dense and smooth ZrSiO_4 film was achieved through dip coating and then heat treatment at 900 ℃ for 0.5 h,which can effectively prevent the Na OH alkali corrosion on monocrystalline silicon substrate.
出处
《陶瓷学报》
CAS
北大核心
2016年第2期133-139,共7页
Journal of Ceramics
基金
国家自然科学基金(51362014,51402135)
江西省科技厅青年科学基金(20142BAB216006)
江西省优秀科技创新团队建设计划项目(20133BCB24010)
江西省教育厅基金(GJJ150887,GJJ150919)
关键词
薄膜
硅酸锆
溶胶-凝胶法
PH值
抗腐蚀性
film
zirconium silicate
sol-gel method
pH value
corrosion resistance properties
