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硅烷偶联剂对制备硅酸锆薄膜及其抗氧化性能的影响 被引量:4

Silane Coupling Agent on Synthesis and Antioxidation Property of Zircon Film
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摘要 采用乙酸锆和正硅酸乙酯为原料,硅烷偶联剂3-氨丙基三乙氧基硅(APTES)为表面改性剂,通过溶胶-凝胶法制备了致密硅酸锆薄膜。系统研究了APTES的添加对硅酸锆薄膜的晶体结构、显微形貌及其抗氧化性能的影响。实验结果表明,添加硅酸锆摩尔浓度10mol%的APTES可以制备出纯相的致密硅酸锆薄膜,超过这一浓度则会出现少量的SiO_2杂质,同时造成硅酸锆溶胶的黏度迅速升高。AFM测试结果表明添加APTES制备的薄膜更致密平滑。1300℃抗氧化测试102 h后,未镀膜的碳化硅基底增重0.16%,相比之下,添加APTES前后的样品的增重分别为0.08%和0.03%,说明添加APTES有利于提高ZrSiO_4薄膜的致密度,进而提高其抗氧化性能。 The dense zircon film was prepared via Sol-Gel method using zirconium acetate and tetraethoxysilane as raw materials, and silane coupling agent 3-aminopropyltriethoxysilane(APTES) as surface modifying agent, respectively. Influences of APTES on the phase composition, morphology and antioxidation property of the ZrSiO_4 film were investigated. The experiment results indicated that the pure and dense zircon film was achieved with addition of 10 mol% APTES into ZrSiO_4 sol. Once the molar ratio of APTES was beyond 10 mol%, the impurity Si O2 was observed, and the viscosity of the ZrSiO_4 sol increased significantly at the same time. AFM results showed that the smooth and dense film was obtained with APTES addition. After 102 h oxidation cyclic test at 1300℃, uncoated Si C substrate gained weight of 0.16%, while samples coated with ZrSiO_4 thin films only gained weight of 0.08% and 0.03% before and after addition of APTES. In summary, APTES addition is beneficial for the density of ZrSiO_4 thin film, resulting in excellent anti-oxidation property.
出处 《无机材料学报》 SCIE EI CAS CSCD 北大核心 2017年第11期1154-1158,共5页 Journal of Inorganic Materials
基金 国家自然科学基金(51402135 51362014) 江西省科技计划项目(20151BBE50015) 江西省教育厅基金(GJJ150919 GJJ150935)~~
关键词 薄膜 硅酸锆 溶胶-凝胶法 抗氧化 thin film zircon Sol-Gel method anti-oxidation
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