期刊文献+

Chemical vapor deposition growth of large-scale hexagonal boron nitride with controllable orientation 被引量:14

Chemical vapor deposition growth of large-scale hexagonal boron nitride with controllable orientation
原文传递
导出
摘要 Chemical vapor deposition (CVD) synthesis of large-domain hexagonal boron nitride (h-BN) with a uniform thickness is very challenging, mainly due to the extremely high nucleation density of this material. Herein, we report the successful growth of wafer-scale, high-quality h-BN monolayer films that have large single-crystalline domain sizes, up to -72 μm in edge length, prepared using a folded Cu-foil enclosure. The highly confined growth space and the smooth Cu surface inside the enclosure effectively reduced the precursor feeding rate together and induced a drastic decrease in the nucleation density. The orientation of the as-grown h-BN monolayer was found to be strongly correlated to the crystallographic orientation of the Cu substrate: the Cu (111) face being the best substrate for growing aligned h-BN domains and even single-crystalline monolayers. This is consistent with our density functional theory calculations. The present study offers a practical pathway for growing high-quality h-BN films by deepening our fundamental understanding of the process of their growth by CVD. 有一致厚度的大域的六角形的硼氮化物(h-BN ) 的化学蒸汽免职(CVD ) 合成是很挑战性的,主要由于这材料的极其高的成核密度。此处,我们报导晶片规模的成功的生长,有大单人赛水晶的领域尺寸的高质量的 h-BN 单层电影,吗直到~ 72 ??????????????????????????慮潮档湡敮獬???????慮潮畴敢??洠獥灯牯???? ??
出处 《Nano Research》 SCIE EI CAS CSCD 2015年第10期3164-3176,共13页 纳米研究(英文版)
基金 Acknowledgements The work was supported by the National Natural Science Foundation of China (Nos. 51432002, 50121091, 51290272, and 51222201), the National Basic Research Program of China (Nos. 2013CB932603, 2012CB933404, 2011CB933003, 2011CB921903, and 2012CB921404), and the Ministry of Education (No. 20120001130010).
关键词 hexagonal boron nitride Cu foil domain size ORIENTATION chemical vapordeposition (CVD) 化学气相沉积 生长空间 生长取向 六角氮化硼 Cu(111) 可控 密度泛函理论 成核密度
  • 相关文献

参考文献43

  • 1Novoselov, K. S.; Geim, A. K.; Morozov, S. V.; Jiang, D.; Zhang, Y.; Dubonos, S. V.; Grigorieva, I. V.; Firsov, A. A. Electric field effect in atomically thin carbon films. Science2004, 306, 666-669. 被引量:1
  • 2Huang, X.; Qi, X. Y.; Boey, F.; Zhang, H. Graphene-based composites. Chem. Soc. Rev. 2012, 41, 666-686. 被引量:1
  • 3Huang, X.; Yin, Z. Y.; Wu, S. X.; Qi, X. Y.; He, Q. Y.; Zhang, Q.; Yan, Q.; Boey, F.; Zhang, H. Graphene-based materials: Synthesis, characterization, properties, and applications. Small2011, 7, 1876-1902. 被引量:1
  • 4Gao, T.; Song, X. J.; Du, H. W.; Nie, Y. F.; Chen, Y. B.; Ji, Q. Q.; Sun, J. Y.; Yang, Y. L.; Zhang, Y. F.; Liu, Z. F. Temperature-triggered chemical switching growth of in-plane and vertically stacked graphene-boron nitride heterostructures. Nat. Commun. 2015, 6. 6835. 被引量:1
  • 5Hunt, B.; Sanchez Yamagishi, J. D.; Young, A. F.; Yankowitz, M.; LeRoy, B. J.; Watanabe, K.; Taniguchi, T.; Moon, P.; Koshino, M.; Jarillo-Herrero, P. et al. Massive Dirac Fermionsand Hofstadter Butterfly in a van der Waals heterostructure. Science 2013, 340, 1427-1430. 被引量:1
  • 6Yang, W.; Chen, G. R.; Shi, Z. W.; Liu, C. C.; Zhang, L. C.; Xie, G. B.; Cheng, M.; Wang, D. M.; Yang, R.; Shi, D. X. et al. Epitaxial growth of single-domain graphene on hexagonal boron nitride. Nat. Mater. 2013, 12, 792-797. 被引量:1
  • 7Levendorf, M. P.; Kim, C. J.; Brown, L.; Huang, P. Y.; Havener, R. W.; Muller, D. A.; Park, J. Graphene and boron nitride lateral heterostructures for atomically thin circuitry. Nature 2012, 488, 627-632. 被引量:1
  • 8Liu, Z.; Ma, L. L.; Shi, G.; Zhou, W.; Gong, Y. J.; Lei, S. D.; Yang, X. B.; Zhang, J. N.; Yu, J. J.; Hackenberg, K. P. et al. In-plane heterostructures of graphene and hexagonal boron nitride with controlled domain sizes. Nat. Nanotech. 2013,8, 119-124. 被引量:1
  • 9Wang, M.; Jang, S. K.; Jang, W. J.; Kim, M.; Park, S. Y.; Kim, S. W.; Kahng, S. J.; Choi, J. Y.; Ruoff, R. S.; Song, Y. J. et al. A platform for large-scale graphene electronics -CVD growth of single-layer graphene on CVD-grown hexagonal boron nitride. Adv. Mater. 2013, 25, 2746-2752. 被引量:1
  • 10Zhang, C. H.; Zhao, S. L.; Jin, C. H.; Koh, A. L.; Zhou, Y.; Xu, W. G.; Li, Q. C.; Xiong, Q. H.; Peng, H. L.; Liu, Z. F. Direct growth of large-area graphene and boron nitride heterostructures by a co-segregation method. Nat. Commun.2015, 6, 6519. 被引量:1

同被引文献35

引证文献14

二级引证文献35

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部