摘要
半导体激光器由于自身波导结构的不对称性导致光强分布不均匀而限制了其应用,为了对半导体激光光束进行整形以获得均匀光斑,设计了一种基于微透镜阵列的半导体激光器堆栈匀化系统。分析了微透镜阵列对半导体激光的匀化原理和光束匀化过程,通过分析微透镜边缘衍射对匀化光斑影响确定了微透镜孔径范围,采用近轴矩阵光学推导了目标光斑发散角。结合实例对微透镜阵列光束匀化系统进行了仿真和实验验证,实现了均匀性为91.89%的均匀光斑。
The intensity distribution of diode laser is not uniform due to the broad-area and ridge-waveguide designs, the poor beam quality is the limiting factor of applications. In order to achieve homogenized spot by the beam shaping of high-power diode laser stack, a homogenization system for diode laser stack beams based on microlens array is designed. The diode laser beam shaping theory and process of microlens array are analyzed. The lower limit of clear aperture of microlens is confirmed by the analysis of the impact of the diffraction of microlens edge on the spot homogeneity. The intensity angle distribution of spot is defined by paraxial matrix optical analysis. The simulation and experimental test are carried out for the microlens array beam shaping system, realizing the spot with the homogeneity of 91.89%.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2015年第5期50-57,共8页
Chinese Journal of Lasers
基金
国家863计划
