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基于微透镜阵列的光束积分系统的性能分析 被引量:21

Performance Analysis of Beam Integrator System Based on Microlens Array
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摘要 为了提升高功率固体激光器抽运光束的均匀性,研究了成像型和非成像型光束积分系统光束匀化机理。从光斑尺寸、最大入射角及光斑均匀性三个方面,详细对比了两种积分系统的性能特点。分析表明,成像型光束积分系统不但具有更好的匀化效果,相比非成像型还降低了对半导体激光器(LD)光束准直的要求,并且可调整微透镜阵列间距实现光斑尺寸的改变,拓展了系统应用范围。经实验测试,在照明范围内LD阵列光束经成像型积分系统后光斑不均匀性小于10%。 In order to improve the pump beam homogeneity of high-power solid-state laser, the basic theory of beam homogenization with imaging and non-imaging beam integrator systems is analyzed. Mainly from three aspects, i.e., spot size, maximum incident angle and spot homogeneity, performances of both beam integrator systems are compared in detail. The analysis shows that imping beam integrator system not only provides better homogenization effect and reduces the requirement of be~ collimation than non-imaging beam integrator system, but also can change the distance between two microlens arrays in order to extend its applicable field. Mter passing through the imaging beam integrator system, the spot inhomogeneity of laaer diode stacks is less than 10 % in the illumination area.
出处 《中国激光》 EI CAS CSCD 北大核心 2012年第7期29-35,共7页 Chinese Journal of Lasers
基金 国家863计划资助课题
关键词 光学设计 均匀化 高斯光束 相干光 optical design homogeneity Gaussian beam coherent light
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