摘要
微型机电系统技术是一个新兴的技术领域。本文介绍了微电子机械系统 (MEMS)的特点和关键技术 ,讨论了MEMS的应用 。
The Micro Electro Mechanical Systems(MEMS) is recognized as an emerging field of technology.The features and key technology are introduced,the application of MEMS and its future trends of development are discussed.
出处
《测控技术》
CSCD
2002年第8期1-5,共5页
Measurement & Control Technology
关键词
微电子机械系统
键合技术
微型机器人
micro electro mechanical systems
military application
micromachine
