摘要
针对太阳能电池扩散区无法准确测量的困难,应用仿真软件可以更好的研究太阳能电池扩散区。应用SILVACO软件对太阳电池的两步扩散工艺进行了仿真研究,探索了不同的二次扩散工艺方法对太阳电池性能和扩散区结构的影响。分别对湿法氧化扩散工艺、二氧化硅保护扩散工艺和无氧扩散工艺进行仿真设计。仿真结果表明,湿法氧化二次扩散工艺可以提高电池的表面杂质浓度,形成较浅的PN结。通过对三种不同工艺电池光谱响应的仿真,发现应用湿法氧化二次扩散工艺可以获得最佳光谱响应性能。通过对湿法氧化二次扩散工艺的扩散温度、预淀积浓度的研究,发现随着二次扩散温度的增加,电池的短路电流先增加后降低;随着预淀积浓度的增加,电池的短路电流先增加后降低。
A two step diffusion process based on the software of SILVACO solar cell is designed. And the influ- ence of the processes on the performance of solar cells and the diffusion zone structure are studied by simulation for the diffusion process with wet oxidation, the diffusion process with silicon dioxide and the diffusion process with anae- robic. The simulation results show that the surface concentration increasing with the diffusion process with wet oxida- tion and the PN junction depth is shallow. The Spectral response simulation with the three different processes shows that the diffusion process with wet oxidation can obtain the best spectral response performance. The diffusion tempera- ture and pre - deposition impurity concentration of wet oxidation diffusion process are researched. With the increasing of the diffusion temperature, the Isc enhances at first and then decreases. And the Isc firstly increases,then decreases with the pre -deposition impurity concentration increasing.
出处
《计算机仿真》
CSCD
北大核心
2014年第12期121-124,共4页
Computer Simulation
基金
国家自然科学青年基金项目(51205212)
关键词
太阳电池
扩散
二次扩散
短路电流
Solar cell
Diffusion
Two step diffusion
Short current
