摘要
近年来,基于压电陶瓷驱动的微小型液压泵逐渐开始受到广泛的关注和研究。由于体积重量小、结构简单、能耗低、无电磁干扰等优点,压电泵已经在航空航天、微机电系统等工程领域得到越来越多的应用。主要对国内外压电泵相关的研究进行了概述。首先对压电材料物理特性进行了简要说明,重点介绍了压电泵工作原理、研究意义及当前国内外的研究现状。最后对压电泵的关键技术进行总结,并提出今后的研究方向。
Recently,the micropump based on the piezoelectric ceramics actuator is drawn more and more attention.The piezoelectric pump has more and more applications in the aerospace,MEMS system and so on due to its advantages such as a small volume mass,a simple mechanism,low consumption,no electromagnetic interference.In this paper,a review of PZT pump is presented.Firstly,the physical properties of piezoelectric ceramics are introduced briefly,then the operating principle,research significance and research status of PZT pump are emphasized,finally,several research orientations are put forward after a summary of the key technologies of PZT pump.
出处
《液压与气动》
北大核心
2014年第11期36-43,共8页
Chinese Hydraulics & Pneumatics
基金
国家自然科学基金(51275454&61271084)
关键词
压电陶瓷致动器
压电叠堆泵
电液混合驱动器
piezoelectric actuator
piezoelectric multilayered stack pump
electric-hydraulic hybrid actuator
