摘要
介绍了一种基于PZT薄膜的无阀压电微泵。该微泵利用聚二甲基硅氧烷(PDMS)作为泵膜,自制的压电圆型薄膜片作为驱动部件,采用收缩管/扩张管结构,压电圆型致动片和PDMS泵膜的组合可产生较大的泵腔体积改变。在对微泵制备工艺研究的基础上,对其性能进行了实验研究,结果表明:电压和频率对流速均有显著影响。在7.5 V1、80 Hz的正弦电压驱动下,该压电微泵的最大输出流速为2.05μL/min。该文制作的微泵具有流量稳定,驱动电压较低,性能稳定可靠和易控制等优点,可满足微流体系统的使用要求。
A valveless piezoelectric micropump based on PZT thin film is presented. Polydimethylsiloxane （PDMS） is used as the membrane and a piezoelectric disk fabricated in our laboratory is used as the actuator of the micropump, which has nozzle/diffuse structure. The combination of piezoelectric disk and PDMS membrane can bring large chamber volume change. On the basis of fabrication process of micropump, the flow rate of the micropump is measured. The experimental result shows that the voltage and frequency have a great influence on the flow rate. When a sine voltage of 7.5 V and 180 Hz is applied, the maximum flow rate of piezoelectric mieropump reaches to 2.05 μL/min. Micropump produced in this work has some advantages such as flow stability, low driving voltage, easy control, stable and reliable performance. It can satisfy the requirements of the micro-fluid system.
出处
《压电与声光》
CSCD
北大核心
2008年第4期492-494,共3页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(50675025)
教育部和大连市留学回国人员科研启动基金资助项目
辽宁省博士启动基金资助项目(20051080)
