摘要
在还原炉中制备多晶硅需要密闭且高温的环境,用传统检测方法获得炉内温度场分布比较困难。本文基于FLUENT仿真计算平台,对硅棒生长至50、100、150 mm时的24对棒多晶硅还原炉的辐射传热进行三维数值模拟,得出还原炉内不同硅棒直径时的温度场分布。通过比较模拟的出口尾气温度与多晶硅实际生产中出口尾气的温度,验证模拟结果的可靠性。探讨温度对多晶硅生长的影响,为操作人员在多晶硅生产中控制炉内温度提供理论指导。
Prepare polysilicon need closed and high-temperature in the reduction furnace, it is difficult to obtain reducing furnace temperature field using traditional detection methods. Based on FLUENT simulation platform, three-dimensional numerical simulation of reduction furnace when the silicon rods grow to 50, 100, 150mm is performed. The temperature field distributions of the reduction furnaces with different silicon rod diameters are effectively inferred. By comparing the simulated tailgas outlet temperature with the actual production of polysilicon tailgas outlet temperature, verify that the result of this simulationg is reliable. To investigate the effect of temperature on the growth of polysilicon , the result can provide theory guidance for the operator control the process parameters of preparation polysilicon production.
出处
《工业加热》
CAS
2014年第5期53-56,共4页
Industrial Heating
关键词
多晶硅
还原炉
数值模拟
polysilicon reduction furnace numerical simulation
