摘要
采用射频辉光放电聚合技术,在低压等离子体聚合装置上开展在5～20W功率下氘代辉光放电聚合物薄膜的制备及性能研究.利用傅里叶变换红外吸收光谱仪表征薄膜的化学结构,讨论了功率变化对其官能团结构的影响规律.利用元素分析仪和纳米压痕仪表征薄膜中氘原子的相对含量和薄膜的力学性能.研究表明：随着功率的升高,薄膜中的氘含量先升高后降低,在10W时达到最大,薄膜中SP3CD的相对含量增加,SP3CD2的相对含量减小;聚合物薄膜的硬度和杨氏模量均随功率的增加而减小.
Carbon deuterium polymer films were fabricated at different powers by the discharge polymerization technology. The difference of chemical structures was characterized by FT IR. analysis and the hardness and modulus of films were measured by The content of deuterium of films was characterized by element nanoindentation. It was found that with the RF power increas ing, the D contents in the films firstly increased, then decreased, and reached to the biggest at 10W. The CD bands content in creased, while the CD2 bands content decreased. The hardness and modulus of films decreased when the RF power increased.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2014年第12期124-128,共5页
High Power Laser and Particle Beams
基金
国家高科技发展计划项目
关键词
等离子体聚合
氘代辉光放电聚合物
红外吸收谱
力学性能
plasma polymerization carbon deuterium film infrared absorption spectrum mechanical property
