摘要
主要介绍了基于MEMS的微泵 10年来的研究成果和研究现状。微泵是微电子机械系统(MEMS)中重要的执行器件 ,在系统中占有很重要的地位。微泵可以分为有阀泵和无阀泵两大类 ,一般来说 ,有阀泵的制造工艺和应用技术比较成熟 ,但存在加工尺寸限制和使用寿命的问题 ;无阀泵的原理新颖 ,结构相对简单 ,更适合微型化发展 ,是目前研究的热点。
The research on the micropump in the past decade is reviewed.Micropump,as an important executive device of MEMS,plays a very important role in micro systems.They are divided into two types that are pumps with valves and those without them.In general,the manufacture and the application of the valved micropumps are ripe,however the size limitation of fabrication and the problem of short operating life have always been trouble.The valveless micropump is novel in mechanism,simple in structure,and suitable for micromation.And now it has been a hot research field.
出处
《传感器技术》
CSCD
北大核心
2002年第6期59-61,共3页
Journal of Transducer Technology
基金
国家重大自然科学基金项目(59995550-2 )
国家重点基础研究发展规划项目 (G19990 3 3 10 6)
