摘要
本文介绍了双波长激光量块干涉仪的工作原理 ,详细描述了仪器的光学、机械设计以及干涉图象处理和量块中心长度自动判读技术。该干涉仪满足 1等量块的测量不确定度要求 。
This paper introduces the principle of laser interferometer for gauge block measurement with double wavelengths, describes the optical and mechanical design, as well as the technology of the interference image processing and automatic identify of central lengths of gauge blocks. The interferometer achieves the measurement uncertainty for the 1 st grad gauge blocks and has be used to the automatic measurement of the high-grad gauge blocks.
出处
《上海计量测试》
2001年第5期10-12,共3页
Shanghai Measurement and Testing
