摘要
本文介绍了双波长激光量块干涉仪中使用的温度、湿度和气压传感器,描述了其工作原理、设计方案、测量不确定度以及校准方法。这些传感器同样可用于其他高准确度长度测量的激光干涉系统中。
This paper introduces the sensors of temperature ,humidity and pressure, applied in the laser interferometer for gauge block measurement with double wavelengths, describes the principle ,design, uncertainty of measurement,as well as the method of calibration. They could be also used to other laser interferometers for high-grad length measurement.
出处
《上海计量测试》
2007年第3期12-14,共3页
Shanghai Measurement and Testing
关键词
激光干涉仪
传感器
校准
gauge block
laser interferometer
sensor
calibration
