摘要
本文利用具有F-P标准具的管状基准的等倾干涉原理,设计了两种具有管状基准照明系统的斐索平面相移式干涉仪。这两种干涉仪通过气泵来增压或者减压管状基准主体内的气压,从而改变管状基准内介质折射率,进一步改变参考光和测量光的光程差,以此实现相移技术,完成对平晶平面度的测量。两种干涉仪分为立式和卧式,分别对应不同使用场景。相较于等倾干涉仪测量系统,本文设计的干涉仪系统改善了热交换的环境,测量点数增多,可给出被测平晶平面地形图;相较于利用压电陶瓷实现相移技术的菲索平面干涉仪,本文设计的干涉仪系统在测量中没有机械运动的移相,且造价更低,安全性更高。
In this paper,two kinds of Fizeau plane phase-shifting interferometers with tubular reference lighting system are designed by using the principle of isobaric interferometry with tubular reference of F-P etalon.The two types of interferometers can increase or decrease the pressure in the tubular reference body by air pump,so as to change the refractive index of the medium in the tubular reference body and further change the optical path difference between the reference light and the measured light,thus realizing the phase-shifting technology,the flatness of the flat crystal was measured.Two types of interferometers are divided into vertical and horizontal,respectively corresponding to different use of the scene.Compared with the Isobaric Interferometer System,the interferometer system designed in this paper can improve the heat exchange environment,increase the number of measurement points,and give the measured flat crystal plane topographic map Compared with the Fischer Planar Interferometer,which uses piezoelectric ceramics to realize phase-shifting,the interferometer system designed in this paper has no mechanicalphase-shifting,lower costand higher safety.
作者
龚柯安
付天坤
何晨嵩
张成悌
付宁
李华
GONG Ke'an;FU Tiankun;HE Chensong;ZHANG Chengti;FU Ning;LI Hua(Nantioal Institute of Measurement and Testing Technology,Chengdu 610021,China;Chengdu Technological University,Chengdu 611730,China;Chengdu New Chenglinag Tools Co.,Ltd.,Chengdu 610503,China)
出处
《中国测试》
CAS
北大核心
2024年第S01期106-109,共4页
China Measurement & Test
关键词
管状基准
斐索干涉仪
相移技术
平面度测量
tubular reference
fizeau interferometer
phase shift technology
flatness measurement
