摘要
电子陶瓷在过去十多年里获得了重大发展，为了预测未来几年电子陶瓷科研与开发的趋势，对有关文献和所获得的专家调查资料进行重点介绍。今后几年介电陶瓷的重要方向仍然是MLC和微波介质陶瓷。传感器、驱动器、压电换能器、压电陶瓷元件等将是今后几年压电陶瓷的发展方向。半导体存储器件，微驱动器和微型电动机将是今后几年的重要方向。薄膜沉积过程，非易失性存储器（NVM）等将获得重要的发展。
Electronic ceramics have developed significantly in the last ten years. To predict the R&D trends for dielectrics, piezoelectrics ceramics and ferroelectric thin films, some information are given and discussed based on relevant literatures and a direct result of a questionnaire from Japanese technologists in the field of electronic ceramics. Integrated, multifunctional MLC devices and packages, and microwave dielectrics, sensors/actuators devices and piezoelectrics, semiconductor memories, microactuators and micromotors will become important in the next few years. (14 refs.)
出处
《电子元件与材料》
CAS
CSCD
北大核心
2001年第3期25-27,共3页
Electronic Components And Materials
