摘要
从全息衍射光栅的制作原理出发 ,介绍了全息光栅的主要制作方法 ,并与刻划光栅对比分析了全息衍射光栅的诸多优点。通过利用光栅设计的耦合波理论对全息衍射光栅槽型、槽深及槽间距等进行了优化设计 ,同时利用离子束刻蚀技术获得了高效率全息光栅。
WT5BZ]In light of the manufacturing principles of holographic diffraction gratings, the paper presents a main method of manufacturing the holographic gratings. In comparison with ruling gratings, the holographic diffraction gratings have many advantages. Using the coupling wave theory and ion etching, the design and efficiency of the gratings have been optimized and improved, respectively. The paper also gives various key technologies in manufacturing high efficient holographic diffraction gratings in detail. [WT5HZ]
出处
《光学精密工程》
EI
CAS
CSCD
2001年第2期109-114,共6页
Optics and Precision Engineering
关键词
全息光栅
离子刻蚀
衍射效率
holographic gratings
ion etching
diffraction efficiency
