摘要
以醋酸锌水溶液为前驱体溶液,采用超声喷雾热分解法在玻璃衬底上制备得到了温度在350℃到450℃范围内的ZnO薄膜。用X射线衍射(XRD)、扫描电镜(SEM)及紫外-可见分光光度计分析了ZnO薄膜的晶体结构、微观形貌及其光学性质,重点探究了衬底温度对ZnO薄膜生长过程及微观结构的影响。分析表明:制备的ZnO薄膜为六角铅锌矿结构,衬底温度对薄膜的质量有着重要的影响;所得薄膜在400℃时结晶性能好,沿c轴择优取向生长,具有优良的均匀性和致密性;所制备的薄膜在可见光区透过率高达86%以上,在紫外光区吸收强烈。
ZnO thin films were prepared on glass substrate by ultrasonic spray pyrolysis method from 350℃ to 450 ℃ using zinc acetate solutions as precursor solution. The crystal structure, morphology and optical property of the ZnO films were analyzed by X-ray diffraction（XRD） , scanning electron microscopy （SEM）and ultraviolet-visible spectrophotometer. The effect of the substrate temperature on the growth processing and the microstructure of ZnO films were studied. The results show that the ZnO thin films exhibit the hexagonal wurzite polycrystalline structure. Temperature has great influence on the quality of the thin films. The as-prepared thin films have good crystallinity with excellent uniformity and compactness and exhibit the highly preferential orientation along c axis when the substrate temperature is 400℃. All the films have a high visible transmittance which are more than 86% and high ultraviolet absorption value.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2014年第3期523-527,共5页
Journal of Synthetic Crystals
基金
四川省科技厅基金资助项目(009JY0143)
西华师范大学基本科研基金资助项目(13C008)
关键词
ZNO薄膜
超声雾化热解法
衬底温度
微观形貌
透过率
ZnO thin film
ultrasonic spray pyrolysis
substrate temperature
morphology
transmittance
