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退火气氛和镧掺杂浓度对ZnO薄膜结构和光学性能的影响 被引量:5

Influence of Annealing Atmospheres and La Doping Contents on Crystal Structures and Optical Properties of ZnO Films
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摘要 采用溶胶-凝胶浸渍提拉法在玻璃衬底上制备Zn1-xLaxO(x=0~0.04)(LZO)薄膜,分别在空气、氮气和氩气条件下进行退火,探讨了不同退火气氛和不同镧掺杂浓度对其结构和光学性能的影响。XRD和SEM结果表明:氩气退火条件下ZnO的晶粒尺寸比空气退火条件下和氮气退火条件下的晶粒尺寸略小,且ZnO晶粒的尺寸随着镧掺杂浓度的增加而减小。薄膜光致发光(PL)测量表明:紫光发光带中心在氩气下退火相对于空气下退火存在略微的蓝移,而在氮气下退火则相反;ZnO紫光发光带的位置随着镧掺杂浓度的增加先红移而后蓝移。禁带宽度在镧掺杂量为2%时达到最小值,说明镧可以有效地调节ZnO的禁带宽度。 Zn1-xLaxO(x = 0-0.04)thin films were prepared on glasses by sol-gel method and were annealed under air, nitrogen and argon respectively. The influences of annealing atmospheres and La doping contents on crystal structures and optical properties of ZnO films had been researched. XRD and SEM results indicated that the grain size of ZnO under argon annealing atmosphere is smaller than that under air or nitrogen. Grain sizes of ZnO decreased as the La concentration increasing. The photoluminescence (PL) band of ZnO in -410 nm under argon annealing atmosphere showed a blue-shift relative to air atmosphere, while a red-shift is shown under nitrogen armealing. As the La concentration increasign, the PL bands of LZO in ~ 410 nm expressed a red-shift first and then a blue-shift. Band gap of Zn1-xLaxO reached its minimum at x = 0.02, which means that the band gap of ZnO could be effectively adjusted by La doping.
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2013年第8期1515-1520,1525,共7页 Journal of Synthetic Crystals
基金 国家自然科学基金(51172186) 教育部高等学校博士学科点专项科研基金(20106102120051)
关键词 溶胶-凝胶法 ZNO薄膜 镧掺杂 退火 禁带宽度 sol-gel method ZnO thin film La doping annealing band gap
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