摘要
提出了一种新型的四自由度陀螺设计方式,结构设计基于科罗奥利效应采用多敏感模态振动单元组合阵列的形式.与传统二自由度陀螺比较,该陀螺阵列在提高增益的同时保持了本身具有的鲁棒性.在四自由度陀螺的设计中,两个具备固有中心频率差值的完全二自由度振动单元被应用在敏感模态中.通过设定中心频率差值,综合考虑了提高陀螺敏感度和稳定性的因素.陀螺阵列通过联合两个敏感模态振动单元的输出,达到提高敏感模态增益和增强系统敏感度的目的.仿真结果表明:与单个敏感模态振动单元相比,陀螺阵列的增益增加了8dB;而且在敏感模态和驱动模态分别产生了220和160Hz范围内的3dB带宽;两个模态的带宽彼此高度匹配,并且为整个系统提供了160Hz的带宽.陀螺阵列对于结构参数的变化和制造误差都有很强的鲁棒性,从而说明该设计能满足实际需求.
The design of a four degree-of-freedom（DOF）MEMS vibratory gyroscope was reported. Multiple sense-mode oscillators were utilized in the MEMS gyroscope array design,which were based on the Coriolis-induced motion.Compared with the conventional gyroscopes,the gain was improved and the robustness was retained at the same time.In the 4-DOF vibratory gyroscope design,two complete 2-DOF sense-mode oscillators with constant spaced resonance frequencies were utilized in sensemode.The sensitivity and the robustness were considered through setting the spacing between resonance frequencies.The array combines two sense-mode oscillators output to increase the response gain and the sensitivity of the gyroscope.The simulation results show that compared with gyroscope with a single sense-mode oscillator,the gain of gyroscope array is increased by about 8dB;a 3dB bandwidth of 220and 160 Hz are provided in sense-mode and drive-mode respectively;two modes are highly matched with each other,forming a 160Hz bandwidth for the entire system.The array is robust to the structural parameter variations and the fabrication error,illustrating that it could satisfy the requirements in practical applications.
出处
《华中科技大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2014年第3期42-46,51,共6页
Journal of Huazhong University of Science and Technology(Natural Science Edition)
基金
国家自然科学基金资助项目(61203225)
中国博士后科学基金资助项目(2012M510083)
关键词
微机电系统
陀螺阵列
多自由度
模态匹配
增益增强
micro electromechanical system（MEMS）
gyroscope array
multiple DOF
mode-matc-hing
high gain
