摘要
为抑制在微机械陀螺中广泛存在的共模干扰问题,提出一种新型振动微机械陀螺结构设计.陀螺结构采用对称设计,将二自由度振荡系统同时引入到驱动模态和敏感模态中.通过在两个驱动质量块上施加反相位驱动力使驱动模态下质量块始终反向振动.通过左右两个完全相同的框架结构设计,最大限度消除外界振动导致的共模干扰.为消除多自由度驱动模态和敏感模态的耦合,将驱动方向的弹性悬梁引入敏感模态,使微机械陀螺具备双解耦结构.设计出的微机械陀螺,敏感模态增益较驱动模态提高约30 dB.驱动模态和敏感模态的带宽分别为250 Hz和310 Hz.在操作频率区域内可以提供稳定的增益和相位.并且达到有效消除共模干扰的目的.
To eliminate the common mode input in the the micromachined gyroscopes,a novel architecture of the micromachined gyroscope is proposed in this paper.The structure of the MEMS is designed to be symmetrical,and two-degree of freedom（ DOF） oscillators are utilized in both drive-mode and sense-mode.Driving force actuates two driving masses to move with anti-phase in drive-mode.The novel architecture consists of identical left and right tines,which provides immunity to common mode input of environmental variations.To avoid the coupling between drive-mode and sense-mode,the drive-mode suspensions are introduced in sense-mode.The gyroscope is designed to be double-decoupled structure.Compared to the drive-mode of the proposed gyroscope,the gain of frequency response is increased by about 30 dB in the sense-mode.The bandwidth of drive-mode and sense-mode are 250 Hz and 310 Hz respectively.The gyroscope can provide stable gain and phase in the operational frequency region,and provide immunity to common mode input of environmental variations.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2014年第9期105-110,共6页
Journal of Harbin Institute of Technology
基金
国家自然科学基金资助项目(61203225)
中国博士后科学基金资助项目(2012M510083)
关键词
角速度传感器
双解耦结构
微机械陀螺
反相驱动
angular rate sensor
doubly decoupled structure
MEMS gyroscope
anti-phase driving
