摘要
为了提高处理增量位移信息的集成光电传感器输出信号的有效精度,降低输出阻抗,以保证光电传感器的性能。基于0.35μm CMOS工艺,采用Cadence设计了1款用于处理增量位移信号的光电传感器,并对关键参数进行了理论推导以及验证。实验结果表明,该光电传感器输出信号有效精度优于10 bit,输出阻抗低于5Ω,各项性能指标均符合行业标准,并且能够稳定地运行。
In order to improve the output signal effective precision of the integrated photoelectric sensor that proces- ses the incremental displacement information, reducing output impedance, and ensuring the performance of photoe- lectric sensor. A photoelectric sensor for processing incremental displacement signal based on 0.35μm CMOS tech- nology with Cadence is designed, and the key parameters are analyzed theoretically. The experimental results show that the photoelectric sensor output signal effective precision is more than 10 bit, the output impedance is less than 5 Ω, the performance meet industry standards and can run stably.
出处
《电子测量与仪器学报》
CSCD
2013年第10期992-997,共6页
Journal of Electronic Measurement and Instrumentation
基金
国家科技重大专项(2013ZX04007021)
吉林省光电子产业孵化专项资金项目(FH0022)
关键词
增量位移
光电传感器
有效精度
输出阻抗
incremental displacement
photoelectric sensor
effective precision
output impedance
