摘要
设计并加工制作了一种基于绝缘体上硅(SOI)制备工艺的新型静电驱动二维微型扫描镜,并对其工作原理进行了分析。为了有效预测该微型扫描镜的谐振频率及相应的振态,采用有限元分析软件ANSYS对其进行建模和前五阶模态的仿真,并从理论上分析了前两阶扭转模态谐振频率的计算方法。使用激光多普勒测振仪对该扫描镜的谐振频率进行了测量。测量结果表明,二维微型扫描镜前两阶扭转模态的谐振频率分别为402 Hz和1218Hz。该测量结果与软件仿真结果基本吻合,少许差异是由于在仿真模态时未考虑梳齿结构、空气阻尼及环境温度等因素造成的。本研究对设计出结构更简单的静电驱动微型扫描镜有重要的参考价值。
A novel two-dimensional microscanner with electrostatic actuation is designed and fabricated based on silicon-on-insulator （SOI） technology, and the driving principle is analyzed for microscanner. Then the finite element analysis software of ANSYS is used to simulate the models of the first five orders, and the methods to calculate the resonant frequencies are analyzed for expected torsional modes theoretically. The resonant frequencies are measured by laser Doppler vibrometer. The results show that the microscanner could oscillate at the inherent frequencies of 402 Hz and 1218 Hz around the two rotational axes, which are consistent with the simulation results. The slight difference is caused by factors such as the model without comb structures, air damping and environmental temperature. This study is meaningful to design a microscanner actuated electrostatically with simpler structure.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2013年第6期291-296,共6页
Acta Optica Sinica
基金
国家自然科学基金(50805123)
教育部新世纪优秀人才支持计划(NCET-10-0075)
深圳市财政委员会2012年第四批市新一代信息技术产业发展专项资金基础研究计划(JCYJ20120614154203639)资助课题
关键词
光学器件
绝缘体上硅
微型扫描镜
模态仿真
谐振频率
optical devices
silicon-on-insulator
microscanner
mode simulation
resonant frequency
