摘要
研制了一种基于微光机电系统(MOEMS)技术的新型谐振式扫描镜,该扫描镜采用绝缘体上硅(SOI)加工工艺,静电梳齿驱动,利用工艺中残余应力的释放产生垂直梳齿偏差,作为启动电极。针对该器件的机电性能,设计并搭建了一套光学系统测试其性能。结果表明,该器件具有加工工艺简单、低成本、低电压和大的扫描角度等优点。此外,将所制造的两个扫描镜进行合理组合,搭建了利萨如图形的显示装置,显示图案与Matlab软件仿真结果基本一致。
Based on the micro-opto-electro-mechanical systems（MOEMS） technology,a new resonant micro scanning mirror is designed and fabricated.It is actuated by electrostatic combs fingers.Base on the employed silicon-on-insulator（SOI） technology the residual stress during the process is used to create vertical offset in comb structures,which is regard as starting electrode.In order to realize their electromechanical characterizations,an optical experimental equipment is established.The results show that the device has advantages such as simple fabrication process,low driving voltage,and large scanning angle.In addition,two one-dimensional micro scanning mirrors are reasonably combined to make many different Lissajous scanning patterns,which agree very well with Matlab simulations.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2012年第5期215-221,共7页
Acta Optica Sinica
基金
国家自然科学基金(50805123)
教育部新世纪优秀人才支持计划(NCET-10-0075)资助课题
关键词
集成光学
微光机电系统
扫描镜
绝缘体上硅
利萨如图形
激光投影
integrated optics
micro-opto-electro-mechanical system
micro scanning mirror
silicon-on-insulator
Lissajous pattern
laser projection
