摘要
根据光谱共焦位移测量系统的测量原理,分析了光谱共焦测量系统中色散透镜组的性能对整个测量系统性能影响,并提出了设计要求。利用ZEMAX光学设计软件设计了2组透镜,第1组透镜加工装配后进行了性能测试,测量结果与设计结果符合很好。第2组透镜对性能进行了改进,从结果来看,像差、数值孔径、灵敏度及位移分辨率等指标都优于第1组透镜,达到设计要求。
Based on the measuring principle of displacement measure system of chromatic confocal method, the influence of performance of dispersive lens of chromatic confocal system on performance of whole measure system is analyzed, and design requirement of lens is proposed. Two sets of lenses are designed by using optical design software ZEMAX. The first set of lenses is machined and assembled and its performance is tested. The measured results agree with designed results well. Performance is improved in the second set of lenses, from whose designed results, aberrations, numerical aperture, sensitivity and displacement resolution are better than those of the first one, thus the design goal is achieved.
出处
《北京信息科技大学学报（自然科学版）》
2013年第2期42-45,共4页
Journal of Beijing Information Science and Technology University
基金
北京市教委科技面上项目资助(SQKM201211232006)
关键词
光谱共焦
色散透镜设计
微位移测量
chromatic confocal
dispersive lens design
micro-displacement measure
