摘要
本文利用相干高通滤波成像系统对光学元件表面疵病进行了测量 ,提出了等效疵病面积的概念及计算公式 ,由等效疵病面积可计算出与 GB1185 - 89对应的疵病等级 J。实验装置的分辨率为 10μm。
It is discussed to measure surface defects of the optical elements using the coherent filter imaging system. The conception and the calculation formula of the equivalent defects area are put forward. The equivalent defects area calculates the defect grades in the criteria GB1185 89. The experimental setting has 10μm resolving power and the credible defect grades evaluated.
出处
《光学技术》
CAS
CSCD
2000年第4期361-362,共2页
Optical Technique
关键词
表面疵病
相干成像系统
高通滤波
光学元件
surface defects
coherent filter
equivalent defects area
defect grades
