摘要
本文叙述了光学零件表面疵病检测仪的技术方案。它是光、机、电、算一体化的精密自动测量仪器。在设计方案中采用了激光散射,旋转扫描,纵横微调、自动光电补偿、快速数据处理等方法,并对某些关键部件设计进行了较详尽的阐述。
This paper recounts the technical scheme of optical spares su-rface defect examining instrument. It is a fine automatic examininginstrument through combination of optics, mechanics, electricity andComputer. In its design scheme, it adopts methods of laser scattening,ratary scarming, tiny adjnstment in length and breadth, automatic pho-roelectric compensatlon and fast data procossing ete. The design of somekey components are described in dctail.
出处
《长春光学精密机械学院学报》
1989年第2期60-65,共6页
Journal of Changchun Institute of Optics and Fine Mechanics
关键词
光学零件
表面疵病
检测仪
激光
laser settering
rotary scarming automatic phutoelectric campensation
