摘要
叉指电极的应用比较广泛,尤其是用作敏感元件的电极。给出了一种叉指结构电极间分布电阻的计算方法,在理论分析计算的基础上,选取了几种常用尺寸的叉指电极,在中间均匀涂上掺杂的SnO2,通过实验测量其电阻,并与理论计算的结果进行比较,实际测量结果较好地验证了此计算方法的正确性。
Interdigital electrode is used widely, in particular, used as a sensitive element. This paper gives a method of cal- culating interdigital electrode. On the basis of theoretical analysis , we select several commonly used interdigitated elec-trodes, and coat with the sensitive material SnO2 , then compare its experimental measurement resistance with the theoretical calculation results. The actual measurement results verify the correctness of this calculation method.
出处
《江南大学学报（自然科学版）》
CAS
2012年第3期300-304,共5页
Joural of Jiangnan University (Natural Science Edition)
关键词
传感器
敏感元件
叉指电极
分布电阻
计算方法
sensor
sensitive component
Interdigital electrode
distribution resistance
calculation method
