摘要
利用溶胶-凝胶法配制了SnO2前驱溶液墨水,采用喷墨打印技术在金叉指氧化铝基片上制备了不同打印次数的SnO2气敏薄膜元件,通过XRD,SEM对薄膜进行结构分析和形貌观察,研究了喷墨打印次数的改变对薄膜电阻及其气敏性能的影响.实验表明,增加薄膜喷墨打印次数可降低薄膜电阻,提高SnO2薄膜对乙醇、丙酮气体的灵敏度,但会降低对NOx的灵敏性.
SnO_2 ink was prepared by sol-gel method, and SnO_2 gas-sensing thin films with different printing times were fabricated by printing ink onto the Al_2O_3 ceramic substrates with interdigital gold electrodes. The structure and surface morphologies were investigated by SEM and XRD.The influence of printing times on the resistances and sensitivities of SnO_2 thin films was studied.The results show that with increasing printing times, the resistances of the films and the sensitivities to NO_x gas are decreased, but the sensitivities to acetone and ethanol vapor are increased.
出处
《郑州轻工业学院学报（自然科学版）》
CAS
2004年第4期7-10,共4页
Journal of Zhengzhou University of Light Industry:Natural Science
基金
国家高技术研究发展计划(863计划)(2002AA325070)
国家重点基础研究发展规划(973)(G20000672054)
