摘要
针对浸没式光刻机光刻头高速度、高加速度的运动特点,设计了一种短行程、超精密的运动定位平台,以直线交流伺服电机驱动。设计了直线运动平台的机械结构,建立了直线运动平台的数学模型,按部分模型匹配法设计了直线交流伺服电机PID控制器,实现了PID参数自适应的在线调整,进行了多次参数分析和实验验证。实验表明:开发的定位平台,瞬间速度和加速度大,具有理想的动态性能和高稳态精度;控制器的同步控制精度较高,速度同步精度得到了较大提高,可对强机械耦合的多电机实现同步控制,适用于浸没式光刻机等精密仪器领域。
Immersion lithography lithography for the first high-speed,high acceleration of the movement characteristics of a short-stroke design,ultra-precision motion positioning platform to linear AC servo motor drive.A linear motion platform design the mechanical structure,the establishment of a mathematical model of linear motion platform,designed by some of the linear model matching PID controllerAC servo motor,adaptive PID parameters to achieve a line adjustment,a number of parameters for analysis and experimental verification.Experiments show that： the development of positioning platform,instantaneous velocity and acceleration is large,with good dynamic performance and high steady-state accuracy;controller synchronization control of high precision,speed synchronization accuracy has been greatly improved,can be more of a strong mechanical coupling motor synchronization control for immersion lithography machines and other precision instrumentation.
出处
《机械设计与制造》
北大核心
2012年第4期234-236,共3页
Machinery Design & Manufacture
基金
上海市教委基金资助(JD0510)
关键词
精密平台
直线电机
伺服控制
Precision stage
Linear motor
Servo control
