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多光子纳米加工中激光扫描条件对金属微纳结构的影响 被引量:2

Effects of Laser Scanning Conditions on Metallic Micro/Nanostructures in Multiphoton Nanofabrication
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摘要 研究了飞秒激光多光子还原制备银微纳结构技术中激光扫描条件对金属微纳结构与形貌的影响。结果表明:增加激光扫描点间距d可获得较小线宽,延长曝光时间t使线条变宽,增加扫描次数N可使金属微纳结构表面银纳米粒子熔融凝固成较大尺寸颗粒及块状物。 The influences of laser scanning conditions on the silver micro/nanostructures in multiphoton photoreduction of metallic micro/nanostructures and morphology using femtosecond laser were investigated.The results indicated that increasing the distance between scanning points(d) could make the width of lines become smaller and extending the exposure of time(t) could make the lines broadening.Furthermore,the increasing of scanning times(N) led to the formation of large silver particles and lumps on the structures due to the fusion of silver nanoparticles which on the surface of metallic micro/nanostructures.
出处 《材料工程》 EI CAS CSCD 北大核心 2011年第12期58-62,共5页 Journal of Materials Engineering
基金 973计划资助项目(2010CB934103) 国家自然科学基金资助项目(50773091 60907019 50973126 61077028)
关键词 多光子纳米加工 多光子光化学还原 金属微纳结构 multiphoton nanofabrication multiphoton photoreduction metallic micro/nanostructure
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参考文献22

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