摘要
结合指导教师的科研项目,培养研究生和本科生在科研理念引导下,通过"脉冲激光沉积InGaZnO薄膜制备"的实践过程,使学生在毕业设计的有限时间内利用实验室的科研设备,完成InGaZnO靶材制备,在非晶材料上的脉冲激光沉积薄膜,并对制备出的靶材和薄膜的形貌结构、XRD、PL等光谱的检测。通过透明氧化物半导体薄膜制备的实践锻炼,使学生经历了知识、能力、科研素质和创新能力的培养,同时探索在实践教学和科研中如何发挥学生的创新意识和独立从事科研的能力。
InGaZnO ceramic target was obtained by solid-state reactions in atmospheric pre ssure,and the target was tested by X-ray diffraction.Moreover,InGaZnO films was grown with quartz glass as substrate at certain te mperature by PLD.The film was carefully examined by AFM,transmittance spec trum.These tasks will bring with experimental process so that the students have the training of knowledge,ability,scientific research quality and inno vation ability,at the same time how to bring into play the students＇ ability o f independency and innovation consciousness in combining the practice teaching a nd scientific research.
出处
《实验室研究与探索》
CAS
北大核心
2011年第8期112-114,162,共4页
Research and Exploration In Laboratory
基金
北京工业大学教育教学研究重点项目
关键词
脉冲激光沉积
人才培养
实践创新能力
科研创新意识
pulse laser deposition
talents cultivation
practice innovation ability
scien tific research consciousness
