摘要
介绍了蓝宝石单晶的性质和应用领域,对泡生法、VHGF法等蓝宝石单晶生长工艺进行了说明,对蓝宝石单晶生长工艺及设备的国内外发展趋势进行了探讨。
In this paper,the nature and applications of single crystal sapphire were introduced,sapphire crystal growth technology such as Kyropoulos and VHGF method were described,the domestic and international trends of sapphire crystal growth technology and equipment were discussed.
出处
《电子工业专用设备》
2011年第7期7-10,22,共5页
Equipment for Electronic Products Manufacturing
关键词
蓝宝石
单晶
生长
工艺
设备
Sapphire
Crystal
Growth
Technology
Equipment
