摘要
微夹钳输出位移是它的一个重要特性,微夹钳整体尺寸比较小,不能用常规方法测量输出位移。针对微夹钳的特点,提出一种微夹钳位移测试方法,采用非接触式测量,设计了一种基于视觉的微位移测试装置,并开发了配套的测量软件。测试软件通过LabVIEW软件平台实现,能够实现图像标定、测量和图像标注等功能。给出了详细的图像标定方法,通过台式测微尺实现。最后对微夹钳进行位移测试实验,验证了测量装置的可用性,并总结出微夹钳位移随电压变化的规律。位移测量装置的精度为±1μm,且具有一定的通用性,可用于其他MEMS器件的位移测试。
Displacement is one of the microgripper＇s key features, the conventional methods can not be used for measuring its output displacement because of the small size of the microgripper. According to its characteristics, a displacement test method is proposed for the microgripper, using the non-contact measurement, a vision-based micro-displacement measurement devices is designed and the measurement software package is developed. The test software is compiled by the LabVIEW graphical programming language. The program can be realized image calibration, measurement, and image annotation features. A detailed image calibration method is realized through a desktop micrometer. The displacement of microgripper testing experiments is carried out to verify the availability of measuring devices, and summarizes the changing rules of displacement variation with voltage. The device has a certain generality, can be used for displacement test of other MEMS devices, and its precision is ±1 um .
出处
《传感器与微系统》
CSCD
北大核心
2011年第2期44-46,共3页
Transducer and Microsystem Technologies
基金
国家"863"计划资助项目(2007AA04Z335)
