摘要
为了解决微机械陀螺仪驱动和检测模态耦合的问题,提出了一种新型的双质量块双线振动结构方案。根据微陀螺的结构和工作原理,对其驱动和检测模态进行了理论分析,给出了简化的动力学方程,并利ANSYS有限元分析软件进行了数值仿真,以验证设计思想的正确性。
A new two-lane&two-mass vibration structure plan was proposed,due to solve the micro-gyroscope-driven and test mode coupling problem,.According to micro-gyro structure and working principle,its driver and test a theoretical modal analysis,simplified dynamic equations are given,and the use of ANSYS finite element analysis software,numerical simulation,to verify the correctness of design.
出处
《计算机光盘软件与应用》
2010年第8期104-104,110,共2页
Computer CD Software and Application
关键词
微机械陀螺
梳齿驱动
结构解耦
品质因数
ANSYS仿真
Mmicromachined gyroscope
Comb drive
Structure decoupling
Quality factor
ANSYS simulation