摘要
抽真空效率对电子束的整个加工时间起着决定性的作用。在分析系统要求的基础上,设计出真空系统原理图,制定出真空系统的工作流程,并介绍此真空系统的特点。设计出真空系统的控制原理图,制造出真空装置并进行实验。结果表明该系统适用于电子束加工。
Vacuumizing efficiency is vital to process time with electron beam. The operating keystone of vacuum system was designed based on the analysis of system request. The work flow of the vacuum system was established and its characteristic was introduced. The controlling circuit of the vacuum system was designed while this vacuum device was made and its performance was tested. The experimental results show that it is suitable for electronic beam machining.
出处
《机床与液压》
北大核心
2010年第14期1-2,8,共3页
Machine Tool & Hydraulics
基金
国家自然科学基金资助项目(50775229)
重庆市重点自然科学基金资助项目(2008BA3014)
关键词
电子束
真空系统
扩散泵
Electron beam
Vacuum system
Diffusion pump
