摘要
本文简述扩散泵的原理、特点、分类、用途,回顾国内扩散泵发展的历史进程,分析扩散泵的现实水平、状况,探讨扩散泵未来的发展前景。
In this paper,the principle,characteristics,classification and application of diffusion pump are briefly described.The historical process of the domestic diffusion pump development is reviewed.The actual level and present condition of the diffusion pump are analyzed.The future development prospect of the diffusion pump is discussed.
作者
张志军
张世伟
韩进
徐成海
ZHANG Zhi-jun;ZHANG Shi-wei;HAN Jin;XU Cheng-hai(School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)
出处
《真空》
CAS
2019年第5期12-20,共9页
Vacuum
基金
国家自然科学基金,31371873,31000665,51176027,31300408
关键词
扩散泵
特点
历史
现状
前景
diffusion pump
characteristics
history of development
current situation
prospect