摘要
以麦克斯韦电磁场理论为基础,建立了基于COMSOL Multiphysics有限元软件的强流脉冲电子束混合场仿真模型。通过数值计算,得到了强流脉冲电子束磁场、阳极的放电波形,以及强流真空二极管内部潘宁放电的电子密度分布,分析了氩气气压、磁场电流、阳极、阴极电压等因素对强流脉冲电子束能量分布的影响规律,以期在最小的输入能量下,获得最强的辐照效果。该仿真对于强流脉冲电子束技术在金属和半导体表面处理行业的广泛应用具有良好的参考价值。
A high current pulsed electron beam hybrid field simulation model is established based on Maxwell theory of electromagnetic field with COMSOL Multiphysics finite element software.In order to obtain the strongest irradiation effect with the minimum input energy,the magnetic field and anode discharge waveform of the high current pulsed electron beam,as well as the electron density distribution of Penning discharge inside the high current vacuum diode are studied,and the influence law of Argon pressure,magnetic field current,anode and cathode voltage on the energy distribution of the high current pulsed electron beam is analyzed.This analysis is valuable for the wide application of high current pulsed electron beam technology in metal and semiconductor surface treatment industry.
作者
古亮
刘帮藩
陈新岗
胡晓倩
蔡瑜
伍梦
GU Liang;LIU Bangfan;CHEN Xingang;HU Xiaoqian;CAI Yu;WU Meng(School of Electrical and Electronic Engineering,Chongqing University of Technology,Chongqing 400054,China;Chongqing Engineering Research Center of Energy Internet,Chongqing 400054,China)
出处
《电子器件》
CAS
北大核心
2023年第5期1286-1293,共8页
Chinese Journal of Electron Devices
基金
国家国际科技合作专项项目(2015DFR70480)。
关键词
强流脉冲电子束
COMSOL
电磁耦合
能量分布
影响规律
high current pulsed electron beam
COMSOL
electromagnetic coupling
energy distribution
influence law
