摘要
本文提出了一种用二维零位光栅来实现超高分辨率的绝对测量方法。利用二维零位光栅作为整个系统的零点,可消除SPM仪器的累计误差。本文对二维零位原子光栅的原理,评价指标,评价指标极限的计算,作了详细介绍。本文给出了计算机仿真结果。
In this paper, An absolute measurement method by two dimension zero position grating is presented. When two dimension zero position grating is used as SPM Instrument's zero position, the SPM instrument can realize absolute measurement. The paper mainly discusses the principle of two dimension zero position grating and its evaluation index, gives detail discussion of evaluation limit. The computer simulation result and application prospect are also given in the paper.
出处
《电子显微学报》
CAS
CSCD
1999年第1期137-140,共4页
Journal of Chinese Electron Microscopy Society
关键词
SPM
零位光栅
纳米计量
二维
超高分辨率
scanning probe microscope(SPM)
zero position grating
nano metrology