摘要
采用双靶磁控溅射的方法在不锈钢表面沉积了TiN／Cu-Zn纳米多层膜，研究了多层结构对膜层耐腐蚀性能和抗菌性能的影响，以及表面腐蚀与抗菌的关系。结果表明，Cu-Zn层比较薄时，膜层的耐腐蚀性能比较好，随着Cu-Zn层厚度的增加耐腐蚀性能显著下降。Cu-Zn层薄时，膜层抗菌性能对TLN层厚度较为敏感；而当Cu-Zn层较厚时，抗菌性能对TiN层厚度不敏感，均具有较好的抗菌性能。存在合适的多层结构，如TIN层厚度为3．3～5nm左右，Cu-Zn层厚度约为4nm时，使得膜层具有良好的抗菌性能和耐腐蚀性能。
The TiN/Cu-Zn nano-muhilayers with different modulation periods were deposited by magnetron sputtering of dual targets of titanium and brass on stainless steel substrates. The influence of the mnltilayer growth conditions, such as the modulation period, deposition rate and sputtering power, on the mechanical and antibiotic properties was studled. The cross-sectional microstructures of the multi-layers were characterized with scanning electron microscopy （SEM）. The results show that the Cu-Zn layer thickness significantly affects its surface corrosion resistance and antibiotic behavior. For instance, as the Cu-Zn layer thickness increases, its initial high corrosion resistance markedly decreases. When it comes to antibiotic property, the thin TiN layer outperforms beth the Cu-Zn and the thick TiN layers. We suggest that 3.3 nm to 5nm TiN layer and 4nm of Cu-Zn layer show good corrosion resistance and antibiotic effect.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2010年第1期96-100,共5页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金(No.50773015)
新世纪优秀人才计划
哈尔滨市科技创新人才专项基金(No.2006RFXXS012)
