摘要
本文通过模拟数据的计算,详细分析了椭圆偏振仪数据处理的复杂性,讨论了搜寻精度对准确求解的影响。
The complexity of eUipsometer data processing was detailed analyzed, by the calculation of simulation data, and the impact to accuracy by search accuracy was discussed.
出处
《大学物理实验》
2009年第2期79-82,共4页
Physical Experiment of College
关键词
椭圆偏振
薄膜
厚度
elliptic polarization
film
thickness
