摘要
为了研究薄膜样品的倾斜程度对椭偏法测量薄膜参数的影响,运用椭偏法测量原理及Matlab软件,分析与计算了薄膜样品的倾斜度对测量薄膜参数的影响程度,结果表明这种影响是很小的,并通过实验验证了理论分析与实验结果是相符的。为迅速调整好椭偏仪提供了理论和实验依据。
In order to study the Influence of sample inclination on measuring film parameter byellipsometry method, the impact degree of sample inclination on film parameter was analysed andcalculated by utilizing principle of ellipsometric measurement and MATLAB software in this paper. It is show that this influence is negligible and experimental results agree with the theoreticalones. This can afford the theoretical and experimental proof for adjusting ellipsometer rapidly.
出处
《实验室研究与探索》
CAS
2007年第7期20-22,共3页
Research and Exploration In Laboratory
基金
湖南省教育厅资助科研项目(06C104)
关键词
椭偏仪
薄膜
倾斜度
相对误差
e11ipsometer
film
inclination
relative error
